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ISO 6 | Class 1000 Standards
ISO 14644-1 Standard for Maximum Number of Particles Permitted/m³ for ISO 6 Cleanrooms
(FED STD 209E Equivalent: Class 1,000)
| ≥0.1 µm | ≥0.2 µm | ≥0.3 µm | ≥0.5µm | ≥1µm | ≥5 µm |
| 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO 14644-1 Standard for Maximum Number of Particles Permitted/m³ for ISO 6 Cleanrooms
(FED STD 209E Equivalent: Class 1,000)
| ≥0.1 µm | ≥0.2 µm | ≥0.3 µm | ≥0.5µm | ≥1µm | ≥5 µm |
| 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |