ISO 14644-1 Standard for Maximum Number of Particles Permitted/m³ for ISO 6 Cleanrooms
(FED STD 209E Equivalent: Class 1,000)
|≥0.1 µm||≥0.2 µm||≥0.3 µm||≥0.5µm||≥1µm||≥5 µm|
We utilize ultrapure water and liquid chemical distribution systems to maintain SEMI-57 standards compliance.
The SEMI F57 standard requires fluid-component manufacturers to follow best practices in material science and not contaminate UHP processes with extractable ions, metallics, or total organic carbon (TOC). The standard also covers surface roughness, particle contribution, metallic contamination, and reliability testing.
Our Cleanroom is equipped with quality procedures and equipment to maintain these standards. To learn more about our cleanroom capabilities contact us here.
2571 E. Lindsay Privado, Ontario, CA 91761 USA
Phone (909) 930-6700 | Fax (909) 930-6702